Title :
Simulations of electric field distributions by the susceptor-coupling effects for 2.45GHz microwave inside microwave chamber
Author :
Fu-Kuo Hsueh ; Chih-Chen Chang ; Kun-Ping Huang ; Yao-Jen Lee ; Wen-Fa Wu ; Tien-Sheng Chao
Author_Institution :
Nat. Nano Device Labs., Hsinchu, Taiwan
fDate :
June 29 2015-July 2 2015
Abstract :
More recently, the High Frequency Structure Simulator (HFSS) have been widely used for Fullwave EM simulation tool. In this study, the simulations of the impact of dielectric susceptors for the electric field distribution in the microwave chamber by fixed-frequency (2.45 GHz) microwave generator is investigated. The electric field distributions in cylinder and octagonal shaped chambers were simulated and compared by the adoption of High Frequency Structure Simulator (HFSS).
Keywords :
electric fields; electromagnetic waves; microwave technology; HFSS; cylinder shaped chambers; dielectric susceptors; electric field distributions; frequency 2.45 GHz; full wave EM simulation tool; high frequency structure simulator; microwave chamber; octagonal shaped chambers; susceptor-coupling effects; Cavity resonators; Dielectric constant; Electric fields; Electromagnetic heating; Microwave ovens; Microwave transistors; Shape;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224422
