DocumentCode :
1869851
Title :
Dynamically-balanced folded-beam suspensions
Author :
Shmulevich, Shai ; Hotzen, Inbar ; Elata, David
Author_Institution :
Fac. of Mech. Eng., Technion - Israel Inst. of Technol., Haifa, Israel
fYear :
2015
fDate :
18-22 Jan. 2015
Firstpage :
215
Lastpage :
218
Abstract :
We present a complete methodology for designing a new folded-beam suspension which responds as a linear spring at the fundamental resonance. This is in sharp contrast to the response of standard folded-beam suspensions. The static response of the standard folded-beam suspension is linear over a wide range of motions. But, surprisingly, the dynamic response of the standard folded-beam suspension is strongly nonlinear for small motion amplitudes that are larger than the width of the flexure beams. We have previously shown experimental evidence of this problem with the standard suspension. In contrast, the stiffness of the new dynamically balanced folded-beam suspension is not affected by motion amplitude. In the present work we show new experimental evidence demonstrating that the new design solves this problem.
Keywords :
beams (structures); design engineering; dynamic response; elasticity; springs (mechanical); suspensions (mechanical components); dynamic response; dynamically-balanced folded-beam suspensions; flexure beams; folded-beam suspension design; fundamental resonance; linear spring; small motion amplitudes; static response; stiffness; Dynamics; Electrostatics; Frequency measurement; Laser beams; Resonant frequency; Standards; Suspensions;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
Type :
conf
DOI :
10.1109/MEMSYS.2015.7050925
Filename :
7050925
Link To Document :
بازگشت