Title :
Transport of a cathodic arc plasma inside a magnetized tube
Author :
Cluggish, B.P. ; Wood, B.P.
Author_Institution :
Los Alamos Nat. Lab., NM, USA
Abstract :
Summary form only given. We are investigating the implantation and deposition of material on the inside of a steel tube using a cathodic arc plasma source which is located at one end of the tube. To achieve uniform deposition, losses to the walls of the tube must be minimized by an axial magnetic field, allowing the tube to fill uniformly with plasma. However, the losses must also be periodically maximized (by biasing the tube and/or plasma) to implant and deposit the ions on the walls. To this end, we are performing experiments on the transport of cathodic arc plasmas inside magnetized tubes.
Keywords :
arcs (electric); plasma deposition; plasma transport processes; axial magnetic field; cathodic arc plasma source; cathodic arc plasma transport; deposition; implantation; magnetized tube; periodically maximized losses; steel tube; Amorphous magnetic materials; Copper; Diamond-like carbon; Magnetic flux; Plasma applications; Plasma measurements; Plasma sources; Plasma temperature; Plasma transport processes; Semiconductor films;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.604889