Title :
Diamond milling with an Atomic Force Microscope
Author :
Ippolito, Stephen ; Zumwalt, Sean ; Erickson, Andy
Author_Institution :
Multiprobe Inc., Santa Barbara, CA, USA
fDate :
June 29 2015-July 2 2015
Abstract :
We present diamond milling with an Atomic Force Microscope, as a new technique for site-specific delayering, cutting, and surface preparation of integrated circuits. We demonstrate rapid, in-situ, localized, precision milling inside of a nanoprobing tool, without altering the electrical characteristics of the remaining circuit, and improve the time for analysis.
Keywords :
atomic force microscopy; cutting; diamond; integrated circuit testing; milling; nanoelectronics; probes; atomic force microscope; cutting; diamond milling; electrical characteristics; integrated circuits; nanoprobing tool; precision milling; site-specific delayering; surface preparation;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224442
