• DocumentCode
    1870286
  • Title

    Electroplated stencil reinforced with arch structures for printing fine and long conductive paste

  • Author

    Pi-Hsun Chen ; Che-Hsin Lin

  • Author_Institution
    Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan
  • fYear
    2015
  • fDate
    18-22 Jan. 2015
  • Firstpage
    272
  • Lastpage
    275
  • Abstract
    This study presents an MEMS-based stencil reinforced with arch structures and a surrounding buffer reservoir for printing conductive paste of fine and long lines. The developed reinforced stencil successfully solves the problems came with the conventional stencil structure including limited printable line width and ease of fracture. A novel process was developed to fabricate a thin yet robust electroplated stencil by using two AZ4620 layers and one SU-8 layer as the electroplating molds. A precise stencil with a long and high-density line structure can be produced with the developed method. The printing results show that the developed stencil is capable of printing parallel lines of 20 μm in pitch. The printable length of the fine parallel lines is longer than 10 mm with the arch structure reinforced stencil. In addition, the developed stencil is capable of printing closed ring patterns with small pitch, which is not possible to be printed using conventional stencil or screen printing technologies. The MEMS-based stencil developed in the present study will give substantial impact on the paste printing technologies.
  • Keywords
    electroplating; micromechanical devices; AZ4620 layers; MEMS-based stencil; SU-8 layer; arch structures; buffer reservoir; closed ring patterns; conductive paste; ease of fracture; electroplated stencil; electroplating molds; limited printable line width; paste printing technologies; Fabrication; Nickel; Printing; Reservoirs; Substrates; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
  • Conference_Location
    Estoril
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2015.7050941
  • Filename
    7050941