Integration of RF-MEMS switches with a band-reject reconfigurable ultra-wideband antenna on SiO2 substrate

In this work, these complexities are resolved successfully and the monolithic integration of MEMS with a band-reject UWB antenna is achieved using standard cleanroom photolithography procedures. The MEMS-reconfigurable UWB antenna that is proposed, is fabricated and measured, and results are presented. What distinguishes this work from others is the utilized materials and substrate (low-cost SiO₂ instead of expensive high-resistive Si) and the new application (on-demand band-rejection instead of multi-frequency).