Title :
Fault isolation using Electrically-enhanced LADA (EeLADA)
Author :
Goh, S.H. ; Yeoh, B.L. ; You, G.F. ; Hao, Hu ; Sio, W.L. ; Lam, Jeffrey ; Chua, C.M.
Author_Institution :
Technol. Dev., Product Test & Failure Anal., GLOBALFOUNDRIES, Singapore, Singapore
fDate :
June 29 2015-July 2 2015
Abstract :
Pulsed-LADA is found to play an important role in the advancement of next-generation LADA and it is reported that tens of μs pulses with 10 kHz frequency is sufficient to observe enhancements in carrier injection. Electrically-enhanced LADA (EeLADA), based on pulsed-LADA, is introduced as a new fault localization method capable to overcome current limitation of Laser Assisted Device Alteration (LADA) application on soft failure and extends it to hard failure debug. We present the EeLADA methodology and experimental data to demonstrate its feasibility.
Keywords :
fault location; integrated circuit reliability; integrated circuit testing; laser beam applications; laser beam effects; carrier injection; electrically enhanced LADA; fault isolation; fault localization method; laser assisted device alteration; Failure analysis; Laser beams; Pins; Scanning electron microscopy; Ultrafast optics;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224461
