DocumentCode
1871156
Title
Experimental and theoretical analysis of the optical behavior of textured silicon wafers
Author
Moroz, Victor ; Huang, Joanne ; Wijekoon, Kapila ; Tanner, David
Author_Institution
Synopsys, Inc., Mountain View, CA, USA
fYear
2011
fDate
19-24 June 2011
Abstract
Optical analysis is performed for mono-crystalline silicon wafers with and without the texture and with and without the POCl doping, the passivating anti-reflective nitride film on front surface, and the screen printed aluminum conductor on the back surface. Reflectance is measured in the wavelength range from 300 nm to 1200 nm. Modeling of the light reflectance, absorbance, and transmittance is done using ray-tracing technique for the regular and the random texture patterns. Good agreement of measured and modeled data is obtained for the sub - 1 micron wavelengths by using standard material optical properties. However, the infrared light above the 1 micron wavelength requires accounting for several mono-layers thick native oxide present on silicon surfaces and adjusting the optical properties of specific nitride and aluminum films used in the solar cell manufacturing. It is found that the random texture exhibits 15% to 20% better light capture than the regular texture. Theoretical analysis provides plausible explanation of this effect and suggests a way to further improve optical performance of the textured surfaces. The optical modeling methodology can be used to find the optimum combination of texture and passivating/contact films for different solar cell designs.
Keywords
aluminium; elemental semiconductors; infrared spectra; passivation; ray tracing; semiconductor doping; silicon; silicon compounds; solar cells; surface texture; thin film devices; thin films; ultraviolet spectra; visible spectra; POCI doping; Si; SiN-Al; antireflective nitride film passivation; contact films; infrared light; light absorbance; light reflectance; light transmittance; micron wavelengths; monocrystalline silicon wafers; monolayers thick; optical analysis; optical modeling methodology; random texture patterns; ray-tracing technique; reflectance measurement; screen printed aluminum conductor; solar cell design; solar cell manufacturing; standard material optical properties; textured silicon wafers optical behavior; wavelength 1 mum; wavelength 300 nm to 1200 nm; Films; Optical reflection; Optical surface waves; Reflectivity; Semiconductor device modeling; Silicon; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location
Seattle, WA
ISSN
0160-8371
Print_ISBN
978-1-4244-9966-3
Type
conf
DOI
10.1109/PVSC.2011.6186552
Filename
6186552
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