Title :
Modeling and performance evaluation for automated material handling systems in a 300 mm foundry fab
Author :
Huang, Han-Pang ; Wang, Chun-Tsong
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
A modeling methodology for conceptual design of an automated material handling system using a distributed colored timed Petri net (DCTPN) is developed. The IC fabrication process-flow model is constructed and integrated with AMHS models. In IC fabrication process-flow modeling, a method called virtual tool group is proposed to solve the problem in modeling tool-coupling effects. From this entire fab model, several performance indexes, such as WIP, bottleneck detection, cycle time, wafer operation history tracking, and vehicle utilization can be evaluated from the DCTPN simulation result
Keywords :
Petri nets; discrete event systems; graph colouring; integrated circuit manufacture; materials handling; 300 mm; 300mm foundry fab; WIP; automated material handling systems; bottleneck detection; conceptual design; cycle time; distributed colored timed Petri net; modeling methodology; performance evaluation; performance indexes; process-flow modeling; tool-coupling effects; vehicle utilization; virtual tool group; wafer operation history tracking; Dispatching; Fabrication; Foundries; Integrated circuit modeling; Materials handling; Power system modeling; Robotics and automation; Semiconductor device modeling; Traffic control; Vehicles;
Conference_Titel :
Robotics and Automation, 2002. Proceedings. ICRA '02. IEEE International Conference on
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-7272-7
DOI :
10.1109/ROBOT.2002.1013716
