Dynamic model of an arrayed-type ultrasonic microconveyor for control design

This paper presents a new generation of compliant piezoelectric microconveyors for microobjects based on the cooperation of arrayed direct-drive standing wave ultrasonic actuators. A method using an equivalent electromechanical circuit is proposed for estimating and analysing the optimum driving force. On the basis of the proposed method, the friction drive optimization of the microrobot is performed through the implementation of an electromagnetic field-based preload controller. Preliminary experiments were also performed in order to demonstrate the proposed control method