Title :
Microfabrication Of Sensors And Actuators For Microrobots
Author :
Ehrfeld, W. ; Gotz, F. ; Munchmeyer, D. ; Schmidt, Dan
Author_Institution :
Steag AG, Bereich MT
fDate :
Oct. 31 1988-Nov. 2 1988
Keywords :
Actuators; Application specific integrated circuits; Fabrication; Integrated circuit manufacture; Integrated circuit technology; Manufacturing processes; Robot sensing systems; Robotic assembly; Sensor systems and applications; Silicon;
Conference_Titel :
Intelligent Robots, 1988., IEEE International Workshop on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/IROS.1988.592385
