Cathodic arc plasma density and profile measurements

Summary form only given. We report a series of measurements of ion current density (with a Faraday cup) and integrated electron line density (with a microwave interferometer) for a cathodic arc derived plasma. The ion current measurements were made at various radii from the center of the plasma plume. We compare the differences in electron density and plasma radial profile between cathode materials (erbium and titanium), are current (100 A to 400 A), pressure (10/sup -6/ torr to 10/sup -3/ torr), and the presence or absence of a series magnetic solenoid around the coaxial anode and cathode.