Ultrafine particle counter using a MEMS-based particle processing chip

This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.