Title :
An Integrated Micro Servosystem
Author :
Fujita, Hideaki ; Harada, Masaaki ; Sato, Kiminori
Author_Institution :
Institute of Industrial science, The University of Tokyo
fDate :
Oct. 31 1988-Nov. 2 1988
Keywords :
Biosensors; Capacitance; Capacitive sensors; Electrodes; Electrostatic actuators; Force sensors; Hardware; Mechanical sensors; Servosystems; Silicon;
Conference_Titel :
Intelligent Robots, 1988., IEEE International Workshop on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/IROS.1988.592392
