Title :
Servo Controller For Electrostatic Micro-actuators
Author :
Hashimoto, Hiroya ; Kwee-Bo Sim ; Fujita, Hideaki ; Harashima, F.
Author_Institution :
Institute of Industrial Science, University of Tokyo
fDate :
Oct. 31 1988-Nov. 2 1988
Keywords :
Acceleration; Electrodes; Electrostatic actuators; Friction; Hardware; Insulation; Microactuators; Motion estimation; Servomechanisms; Silicon;
Conference_Titel :
Intelligent Robots, 1988., IEEE International Workshop on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/IROS.1988.592394
