DocumentCode
187322
Title
Micromirror array based optical spatial filter technique for fast and flexible velocimetry
Author
Degner, M. ; Kruger, Heinrich ; Ewald, H.
Author_Institution
Dept. of Gen. Electr. Eng., Univ. of Rostock, Rostock, Germany
fYear
2014
fDate
12-15 May 2014
Firstpage
1416
Lastpage
1420
Abstract
Spatial filtering technique is an optical method for measurement of the relative velocity between the sensor and the observed surface(s). This technique is well known for tens of years, its benefits are a potentially simple optical setup and low requirements to the data acquisition and analysis. Therefore it is a valuable method for online contactless velocimetry. The classical spatial filtering setup is based on a static grating in the optical detection path with at least one or two photodetectors. Newer developments are using line array or two-dimensional detectors (e.g. CCD or CMOS). Here the grating structure is realized by weighting the pixels in a signal pre-processing. The flexibility of adapting the grating to the application is much higher but the detector speed of the array sensors is much lower than that of the photodetectors in the classical setup. Both properties are important for a spatial filter sensor that can be used in a wide range of application. The novel micromirror array based optical spatial filter design that is presented in this paper combines the advantages of both state of the art systems. It utilizes fast photodetectors in combination with a very precise, flexible and high resolved differential grating that is realized by the micromirror array. The present paper gives a short overview on the spatial measurement technique, explains the micromirror array based sensor approach and shows the proof of concept.
Keywords
acceleration measurement; diffraction gratings; length measurement; micro-optomechanical devices; micromirrors; microsensors; optical arrays; optical design techniques; optical filters; optical information processing; optical sensors; photodetectors; position measurement; spatial filters; velocity measurement; CCD; CMOS; MEMS; acceleration determination; data acquisition; differential grating; flexible velocimetry; grating structure; length determination; line array; micromirror array; online contactless velocimetry; optical detection path; optical spatial filter; photodetectors; position determination; relative velocity measurement; sensor; signal preprocessing; simple optical setup; spatial measurement technique; static grating; two-dimensional detectors; Arrays; Gratings; Micromirrors; Optical filters; Optical imaging; Optical sensors; Velocity measurement; MEMS micro mirror; length measurement; position sensing; spatial filter; velocimetry;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference (I2MTC) Proceedings, 2014 IEEE International
Conference_Location
Montevideo
Type
conf
DOI
10.1109/I2MTC.2014.6860979
Filename
6860979
Link To Document