Field emission from teepee-shaped carbon nanotube bundles

Author

Busta, H. ; ToIt, Z. ; Montgomery, J. ; Feinerman, A.

Author_Institution

Cabot Microelectron. Corp., Aurora, IL, USA

fYear

2004

fDate

11-16 July 2004

Firstpage

30

Lastpage

31

Abstract

Carbon nanotubes were fabricated close together so that their separation is smaller than their height and field enhancement effects at the apexes of the tubes are diminished due to electrostatic shielding. Bundling was achieved by embedding the tubes into a PCVD silicon dioxide, followed by HF etching, water rinsing, and nitrogen drying. Emission measurements were performed in a vacuum system at a pressure of 4 × 10^-9 Torr. Current-voltage characteristics were obtained at room temperature, 120 °C and 170 °C. Macroscopic current densities of ²0 mA/cm² were obtained with a 0.5 mm diameter tungsten anode. The turn-on fields are about 15 V/μm.

Keywords

carbon nanotubes; current density; drying; etching; field emission; nanotechnology; plasma CVD; shielding; 0.5 mm; 120 degC; 170 degC; 20 degC; 4E-9 torr; C; HF etching; PCVD silicon dioxide; carbon nanotube bundles; current-voltage characteristics; electrostatic shielding; field emission measurements; field enhancement effects; macroscopic current densities; nanotube bundling; nitrogen drying; room temperature; teepee-shaped carbon nanotube; tungsten anode; turn-on fields; vacuum system; water rinsing; Carbon nanotubes; Current-voltage characteristics; Dry etching; Electrostatic measurements; Hafnium; Nitrogen; Performance evaluation; Pressure measurement; Silicon compounds; Vacuum systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International

Print_ISBN

0-7803-8397-4

Type

conf

DOI

10.1109/IVNC.2004.1354883

Filename

1354883