Title :
A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak
Author :
Takahashi, H. ; Isozaki, A. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.
Keywords :
cantilevers; design engineering; pressure sensors; Reynolds number; airflow suppression; barometric pressure change detector; bristled wing; comb cantilever; comb structure; continuous membrane wing; differential pressure; slight air leak; thrips; Atmospheric modeling; Detectors; Electrical resistance measurement; Fabrication; Pressure measurement; Resistance; Sensitivity;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051055