Title :
Micro triple-hot-wire anemometer on small sized glass tube fabricated in 5DOF UV lithography system
Author :
Shuwei Liu ; Zhuoqing Yang ; Yi Zhang ; Fei Xue ; Shanshan Pan ; Jianmin Miao ; Norford, Leslie K.
Author_Institution :
Nangyang Technol. Univ., Singapore, Singapore
Abstract :
This paper reports novel designed and fabricated micro airflow sensors based on the hot-wire sensing principle, i.e. gas cooling of electrically heated resistance. With three micro Ti/Pt hot-wire components with width of 50 μm and thickness of 130 nm fabricated on a glass tube (outer diameter of 2.8mm and inner diameter of 2.1mm) in five degrees of freedom (5DOF) UV lithography system with multi-layer alignment, the sensors on a cylindrical base have demonstrated high sensitivity, fast response time and ability to detect wind speed and direction. Environmental characterization of sensor at different levels of temperature, humidity and solar radiation has been carried out.
Keywords :
anemometers; glass; microsensors; pipes; ultraviolet lithography; 5DoF UV lithography system; Ti-Pt; cylindrical base; electrically-heated resistance; environmental characterization; fast response time; five-degrees-of-freedom UV lithography system; gas cooling; hot-wire sensing principle; humidity level; micro titanium-platinum hot-wire components; microairflow sensor design; microairflow sensor fabrication; microtriple-hot-wire anemometer; multilayer alignment; size 130 nm; size 20 mum; small-sized glass tube; solar radiation level; temperature level; wind speed detection; Electron tubes; Fluid flow measurement; Glass; Temperature measurement; Temperature sensors; Wind speed;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051057
