Title :
Multi roof tile-shaped vibration modes in mems cantilever sensors for liquid monitoring purposes
Author :
Pfusterschmied, Georg ; Kucera, Martin ; Ruiz-Diez, Victor ; Bittner, Achim ; Sanchez-Rojas, Jose Luis ; Schmid, Ulrich
Author_Institution :
Inst. of Sensor & Actuator Syst., Vienna Univ. of Technol., Vienna, Austria
Abstract :
We realized piezoelectrically self-actuated self-sensing cantilever sensors for liquid monitoring purposes excited in higher orders of the roof tile-shaped mode. This advanced class of vibration mode supports very high Q-factors in liquid media and high volume strain values which result in combination with an optimized electrode design in enhanced strain related conductance peaks. Therefore, precise fluid property measurements even for highly viscous liquids like D500 (~ 430 cP) are feasible.
Keywords :
Q-factor; cantilevers; microsensors; vibrations; D500; MEMS cantilever sensors; Q-factors; enhanced strain-related conductance peaks; fluid property measurement; high-volume strain value; highly-viscous liquids; liquid media; liquid monitoring purpose; multiroof tile-shaped vibration modes; optimized electrode design; piezoelectrically self-actuated self-sensing cantilever sensors; Electrodes; Liquids; Media; Q-factor; Sensors; Strain; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051058
