Design and application of an advanced laser spectrometer for industrial process monitoring

Author

Moody, S.E. ; Cunningham, D.L. ; Green, E.D.H. ; Matijasevic, V.

Author_Institution

Orca Photonics Syst. Inc., Redmond, WA, USA

fYear

1999

fDate

28-28 May 1999

Firstpage

426

Lastpage

427

Abstract

Summary form only given. Vacuum deposition of metallic and metal oxide films is economically important in manufacturing products such as semiconductors, superconducting materials, optical component coatings, dielectric insulating coatings, and high-performance composite materials. Because of the high value of improved process measurements, along with the availability of new lasers and optical components, we have undertaken the development of an advanced laser spectrometer for metal vapor monitoring in vacuum deposition.

Keywords

gas sensors; measurement by laser beam; optical design techniques; optical sensors; process monitoring; vacuum deposition; vacuum techniques; visible spectrometers; advanced laser spectrometer; design; industrial process monitoring; metal oxide films; metal vapor monitoring; metallic films; process measurements; vacuum deposition; Coatings; Gas lasers; Optical design; Optical devices; Optical films; Semiconductor device manufacture; Semiconductor films; Semiconductor lasers; Spectroscopy; Superconducting films;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-595-1

Type

conf

DOI

10.1109/CLEO.1999.834402

Filename

834402