Title :
Design and application of an advanced laser spectrometer for industrial process monitoring
Author :
Moody, S.E. ; Cunningham, D.L. ; Green, E.D.H. ; Matijasevic, V.
Author_Institution :
Orca Photonics Syst. Inc., Redmond, WA, USA
Abstract :
Summary form only given. Vacuum deposition of metallic and metal oxide films is economically important in manufacturing products such as semiconductors, superconducting materials, optical component coatings, dielectric insulating coatings, and high-performance composite materials. Because of the high value of improved process measurements, along with the availability of new lasers and optical components, we have undertaken the development of an advanced laser spectrometer for metal vapor monitoring in vacuum deposition.
Keywords :
gas sensors; measurement by laser beam; optical design techniques; optical sensors; process monitoring; vacuum deposition; vacuum techniques; visible spectrometers; advanced laser spectrometer; design; industrial process monitoring; metal oxide films; metal vapor monitoring; metallic films; process measurements; vacuum deposition; Coatings; Gas lasers; Optical design; Optical devices; Optical films; Semiconductor device manufacture; Semiconductor films; Semiconductor lasers; Spectroscopy; Superconducting films;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-595-1
DOI :
10.1109/CLEO.1999.834402
