3-axis all elastomer MEMS tactile sensor

This paper reports the first 3-axis (normal and shear force) all-elastomer capacitive MEMS tactile sensor. A multiphysics finite element model was developed and was used to tailor sensor geometry for high shear force sensitivity. Sensor area was 1.5 × 1.5 mm and used vertical capacitive structures with 20 μm electrode gaps to achieve high shear force sensitivities of 8.8 fF/N, shear force resolutions of 50 mN, and shear range of more than 2000 mN, with a normal force sensitivity of 0.9 fF/N. Fabrication utilized a simple elastomer molding process with reusable DRIE silicon molds for inexpensive manufacturing.