6-axis force-torque sensor chip composed of 16 piezoresistive beams

Author

Nakai, Akihito ; Morishita, Yasuhiko ; Matsumoto, Kiyoshi ; Shimoyama, Isao

Author_Institution

Univ. of Tokyo, Tokyo, Japan

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

730

Lastpage

731

Abstract

This paper reports the design, a part of the fabrication process, especially ion doping method by oblique ion implantation, and experimental results of a 6-axis force-torque sensor chip composed of 16 piezoresistive beams. The sensor chip´s area, 2mm square in size, is one-third of that of the minimum 6-axis sensor chip ever reported. It will enhance the mounting density of sensor array and also reduce the cost in case of volume production. These sensor chips were fabricated by MNOIC, 8-inch MEMS foundry in Japan, and their characteristic variations are enough small to make practical use of them.

Keywords

force sensors; ion implantation; microfabrication; microsensors; piezoresistive devices; semiconductor doping; sensor arrays; torque measurement; 6-axis force-torque sensor chip array; Japan; MEMS foundry; MNOIC; ion doping method; oblique ion implantation; piezoresistive beam; size 8 inch; Doping; Ion implantation; Micromechanical devices; Piezoresistance; Production; Robot sensing systems; Semiconductor device measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051061

Filename

7051061