The effects of process parameters on size, density, structure, and field emission properties of Pd-catalyzed carbon nanotubes synthesized by thermal chemical vapor deposition

Author

Wei, S. ; Kang, W.P. ; Hofmeister, W.H. ; Davidson, J.L. ; Wong, Y.M. ; Huang, J.H.

Author_Institution

Interdisciplinary Graduate Program in Mater. Sci., Vanderbilt Univ., Nashville, TN, USA

fYear

2004

fDate

11-16 July 2004

Firstpage

90

Lastpage

91

Abstract

In this study, various thicknesses of Pd catalytic films were deposited on Ti/Si substrates and pretreated with NH₃. The effects of catalyst deposition parameters and NH₃ pretreatment time (0, 1, and 10 minutes) on the size distribution of Pd catalytic particles, and subsequently, on the diameter and density of synthesized carbon nanotubes (CNTs) were investigated. The CNTs were synthesized by thermal CVD at 750°C using methane (CH₄) as the carbon source, and a mixture of Ar/H₂ (80 vol.%/20 vol.%) as the carrier gas.

Keywords

carbon nanotubes; catalysis; chemical vapour deposition; field emission; metallic thin films; palladium; particle size; 0 min; 1 min; 10 min; 750 degC; C:Pd; Pd catalytic films; Pd catalytic particles; Pd-catalyzed carbon nanotubes; Ti-Si; carrier gas; catalyst deposition parameters; field emission properties; pretreatment time; size distribution; thermal chemical vapor deposition; Argon; Carbon dioxide; Carbon nanotubes; Chemical vapor deposition; Hydrogen; Materials science and technology; Morphology; Scanning electron microscopy; Substrates; Transmission electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International

Print_ISBN

0-7803-8397-4

Type

conf

DOI

10.1109/IVNC.2004.1354913

Filename

1354913