Title :
Nanotechnology: An Overview and Integration with MEMS
Author :
Meyyappan, M. ; Li, Jing ; Li, Jun ; Cassell, Alan
Author_Institution :
Center for Nanotechnology, NASA Ames Research Center, Moffett Field, CA 94035
Abstract :
There are strong research programs in nanotechnology related to chemical sensors, electromechanical devices, actuators, biosensors, etc. in leading laboratories across the world. In many cases, practical systems demand seamless integration of the nanodevice with higher order structures, for example, MEMS. Examples of this using carbon nanotube based chemical and biosensors are presented.
Keywords :
Biological materials; Biosensors; Chemical sensors; Magnetic materials; Micromechanical devices; Nanomaterials; Nanoscale devices; Nanotechnology; Sensor arrays; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627721
