Title :
AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors
Author :
Haoshen Zhu ; Lee, Joshua E.-Y
Author_Institution :
Dept. of Electron. Eng., City Univ. of Hong Kong, Hong Kong, China
Abstract :
We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.
Keywords :
III-V semiconductors; Q-factor; aluminium compounds; crystal resonators; frequency selective surfaces; micromechanical resonators; phononic crystals; 2D phononic crystals; AlN; PnC bandgaps; TPoS micromechanical resonators; acoustic leakage reduction; anchor loss; frequency-selective reflector; insertion loss; outgoing acoustic waves; quality factor; tethers; thin-film piezoelectric-on-silicon MEMS resonators; Acoustics; Crystals; Micromechanical devices; Oscillators; Photonic band gap; Q measurement; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051079
