Batch-fabricated high Q-factor microcrystalline diamond cylindrical resonator

Author

Saito, Daisuke ; Chen Yang ; Heidari, Amir ; Najar, Hadi ; Liwei Lin ; Horsley, David A.

Author_Institution

Univ. of California, Berkeley, Berkeley, CA, USA

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

801

Lastpage

804

Abstract

This paper reports a 1.5 mm batch-fabricated polycrystalline diamond Cylindrical Resonator (CR) for gyroscope applications. The device is fabricated in a cylindrical shape using silicon on insulator (SOI) wafers and deep reactive ion etching (DRIE), which allows flexibility of choosing different geometries and materials for the resonator structure. A quality factor (Q) of 313,100 is measured at the 23 kHz 2 theta elliptical wineglass modes, producing a ring-down time of 4.32 seconds. Annealing CRs at 700 °C in a nitrogen atmosphere improved Q from 75,000 to over 300,000. The highly symmetric fabrication results in CRs with an excellent frequency mismatch of 3 Hz (130 ppm) between the 2 theta degenerate wineglass modes without applying any tuning voltage.

Keywords

Q-factor; diamond; gyroscopes; silicon-on-insulator; sputter etching; CR; DRIE; SOI; batch-fabricated polycrystalline diamond cylindrical resonator; cylindrical shape; deep reactive ion etching; elliptical wineglass modes; gyroscope applications; high Q-factor microcrystalline CR; nitrogen atmosphere; quality factor; resonator structure; silicon on insulator wafers; size 1.5 mm; temperature 700 degC; time 4.32 s; Diamonds; Fabrication; Gyroscopes; Optical resonators; Resonant frequency; Silicon; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051080

Filename

7051080