DocumentCode
1874382
Title
Graphite-on-paper based tactile sensors using plastic laminating technique
Author
Hoang-Phuong Phan ; Dzung Viet Dao ; Toan Dinh ; Brooke, Harrison ; Qamar, Afzaal ; Nam-Trung Nguyen ; Yong Zhu
Author_Institution
Queensland Micro- & Nanotechnol. Centre, Griffith Univ., Brisbane, QLD, Australia
fYear
2015
fDate
18-22 Jan. 2015
Firstpage
825
Lastpage
828
Abstract
We report for the first time a highly sensitive paper-based tactile sensor using laminated graphite drawn on paper. Thanks to the high gauge factor of 26.2, as well as its excellent robustness and humidity-resistance, plastic-laminated graphite-on-paper has a high potential for mechanical sensors. Additionally, the plastic lamination combined with the laser cutting technique proposed in this study would enable the mass production of cleanroom-free fabrication and low-cost MEMS devices.
Keywords
graphite; laminations; laser beam cutting; microfabrication; microsensors; paper; plastics; tactile sensors; C; cleanroom-free fabrication; gauge factor; graphite-on-paper; humidity-resistance; laminated graphite; laser cutting technique; low-cost MEMS device; mass production; mechanical sensor; plastic laminating technique; tactile sensor; Fabrication; Graphite; Piezoresistance; Tactile sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location
Estoril
Type
conf
DOI
10.1109/MEMSYS.2015.7051086
Filename
7051086
Link To Document