Title :
Graphite-on-paper based tactile sensors using plastic laminating technique
Author :
Hoang-Phuong Phan ; Dzung Viet Dao ; Toan Dinh ; Brooke, Harrison ; Qamar, Afzaal ; Nam-Trung Nguyen ; Yong Zhu
Author_Institution :
Queensland Micro- & Nanotechnol. Centre, Griffith Univ., Brisbane, QLD, Australia
Abstract :
We report for the first time a highly sensitive paper-based tactile sensor using laminated graphite drawn on paper. Thanks to the high gauge factor of 26.2, as well as its excellent robustness and humidity-resistance, plastic-laminated graphite-on-paper has a high potential for mechanical sensors. Additionally, the plastic lamination combined with the laser cutting technique proposed in this study would enable the mass production of cleanroom-free fabrication and low-cost MEMS devices.
Keywords :
graphite; laminations; laser beam cutting; microfabrication; microsensors; paper; plastics; tactile sensors; C; cleanroom-free fabrication; gauge factor; graphite-on-paper; humidity-resistance; laminated graphite; laser cutting technique; low-cost MEMS device; mass production; mechanical sensor; plastic laminating technique; tactile sensor; Fabrication; Graphite; Piezoresistance; Tactile sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051086
