Title :
Hierarchical wrinkle structuring on inside wall of closed micro channel
Author :
Takei, A. ; Fujita, H.
Author_Institution :
Center for Int. Res. on Micronano Mechatron., Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper presents a surface structuring method for a closed micro channel. Because fine photolithography can only be made on a flat surface, it has been difficult to make complicated patterns on the inside walls of non-planar microfluidic channels. Here, we demonstrated that micro-scale hierarchical patterns can be formed on the inside walls of the micro channel simply by depositing a plastic thin film in the channel and stretching the micro channel.
Keywords :
microchannel flow; photolithography; plastics; surface structure; thin films; closed microchannel; hierarchical wrinkle structuring; nonplanar microfluidic channels; photolithography; plastic thin film; surface structuring method; Films; Plastics; Residual stresses; Strain; Substrates; Surface morphology; Surface treatment;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051087