Title :
Experimental investigations for micro-fabricated folded-waveguide traveling-wave tube oscillators
Author :
Han, S.T. ; So, J.K. ; Jang, K.H. ; Shin, Y.M. ; Jeon, S.G. ; Kim, J.H. ; Chang, S.S. ; Ryskin, N.M. ; Park, G.S.
Author_Institution :
Scholl of Phys., Seoul Nat. Univ., South Korea
Abstract :
Vacuum tube (folded-waveguide traveling-wave tube oscillator) fabricated by LIGA (deep X-ray lithography: Lithographic, Galvanoformung, Abformung; German acronym) process was successfully developed for the first time.
Keywords :
LIGA; millimetre wave oscillators; travelling wave tubes; vacuum tubes; LIGA; deep X-ray lithography; microfabricated folded-waveguide traveling-wave tube oscillators; vacuum tube; Circuits; Electron beams; Electron tubes; Feedback; Frequency; Laboratories; Millimeter wave technology; Oscillators; Submillimeter wave technology; Vacuum technology;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354928
