Title :
Thermocouples on trench sidewall in channel fronting on flowing material
Author :
Shibata, Masahiro ; Yamaguchi, Takahiro ; Kumagai, Shinya ; Sasaki, Minoru
Author_Institution :
Toyota Technol. Inst., Nagoya, Japan
Abstract :
In a microfluidic channel, thermocouples were fabricated on the sidewall of microchannel using the three-dimensional photolithography. The thermocouples on the side wall can directly sense the microfluid in the channel, and the accurate temperature measurement can be achieved. Moreover, the thermocouple metals on the sidewall do not make the shadow allowing the observation using the optical microscopy.
Keywords :
flow measurement; flow sensors; microchannel flow; microsensors; photolithography; temperature measurement; thermocouples; 3D photolithography; channel fronting; flowing material; microfluidic channel; optical microscopy; temperature measurement; thermocouple metals; trench sidewall; Films; Lithography; Microchannels; Resists; Substrates; Temperature measurement; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051090
