DocumentCode
1874486
Title
Thermocouples on trench sidewall in channel fronting on flowing material
Author
Shibata, Masahiro ; Yamaguchi, Takahiro ; Kumagai, Shinya ; Sasaki, Minoru
Author_Institution
Toyota Technol. Inst., Nagoya, Japan
fYear
2015
fDate
18-22 Jan. 2015
Firstpage
841
Lastpage
844
Abstract
In a microfluidic channel, thermocouples were fabricated on the sidewall of microchannel using the three-dimensional photolithography. The thermocouples on the side wall can directly sense the microfluid in the channel, and the accurate temperature measurement can be achieved. Moreover, the thermocouple metals on the sidewall do not make the shadow allowing the observation using the optical microscopy.
Keywords
flow measurement; flow sensors; microchannel flow; microsensors; photolithography; temperature measurement; thermocouples; 3D photolithography; channel fronting; flowing material; microfluidic channel; optical microscopy; temperature measurement; thermocouple metals; trench sidewall; Films; Lithography; Microchannels; Resists; Substrates; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location
Estoril
Type
conf
DOI
10.1109/MEMSYS.2015.7051090
Filename
7051090
Link To Document