Title :
Nanofiber forests as a humidity-sensitive material
Author :
Lei, C. ; Tang, L.C. ; Mao, H.Y. ; Wang, Y. ; Xiong, J.J. ; Ou, W. ; Ou, Y. ; Ming, A.J. ; Li, D. ; Tan, Q.L. ; Wang, W.B. ; Chen, D.P. ; Liang, T.
Author_Institution :
Key Lab. of Microelectron. Devices & Integrated Technol., Inst. of Microelectron., Beijing, China
Abstract :
Nanofiber forests with high hydrophilicity and humidity-sensitivity are reported in this work. They are fabricated from polyimide (PI) by a plasma-stripping technique, and are utilized as a humidity-sensitive material in humidity sensors. In a relative humidity range of 50%-80%, nanofiber forest-based devices have capacitance ~50% larger than that of PI-based sensors. Meanwhile, as the nanofibers construct a non-closed layer, the internal nanostructures are fully exposed to external environment, thus the absorption and desorption of moisture consume only a short time. Since the fabrication processes for both nanofiber forests and the devices are simple and fast, thus such a method may provide possibility for development of novel humidity sensors with high sensitivity and short response time.
Keywords :
desorption; humidity sensors; hydrophilicity; moisture; nanofabrication; nanofibres; nanosensors; plasma materials processing; desorption; humidity sensors; humidity-sensitive material; hydrophilicity; internal nanostructures; moisture; nanofiber forest-based devices; plasma-stripping; polyimide; Capacitance; Humidity; Moisture; Nanoscale devices; Plasmas; Plastics;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051094