Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator

Author

Pang, Wei ; Yan, Le ; Zhang, Hao ; Yu, Hongyu ; Kim, Eun Sok ; Tang, William C.

Author_Institution

Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089-0271

fYear

2006

fDate

2006

Firstpage

78

Lastpage

81

Abstract

This paper introduces a new resonant mass sensor that is based on a lateral extensional mode (LEM) piezoelectric resonator, and has a minimum detectable mass (MDM) of 10^-¹⁵g in air at room temperature. The resonator with size of about 200×50×1 μm³has a quality factor (Q) of > 1,400 at 60MHz, and as small as 0.1ppm shift of its resonant frequency can be detected. The 0.1ppm detection capability corresponds to a mass uncertainty of only about 4.6fg. We have experimentally demonstrated a minimum detectable frequency shift of about ~ 1.6ppm due to an absorption of isopropanol vapor (73 fg) on the sidewalls of the parylene-coated LEM piezoelectric resonator.

Keywords

Absorption; Acoustic sensors; Optical detectors; Optical resonators; Optical sensors; Optical surface waves; Resonance; Resonant frequency; Stress; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

Conference_Location

Istanbul, Turkey

ISSN

1084-6999

Print_ISBN

0-7803-9475-5

Type

conf

DOI

10.1109/MEMSYS.2006.1627740

Filename

1627740