Title :
A New Three-Dimensional Lithography Using Polymer Dispersed Liquid Crystal (PDLC) Films
Author :
Jeon, Jin-Wan ; Choi, Joon-Yong ; Yoon, Jun-Bo ; Lim, Koeng Su
Author_Institution :
Department of Electrical Engineering and Computer Science Korea Advanced Institute of Science and Technology (KAIST) 373-1 Guseong-dong, Yuseong-gu, Daejeon, Republic of Korea TEL:+82-42-869-8027, FAX:+82-42-869-8530, E-mail: didy@kaist.ac.kr
Abstract :
In this paper, we have proposed a new three-dimensional (3-D) lithography using polymer dispersed liquid crystal (PDLC) films. The scattering or transmission rate of ultraviolet (UV) rays through the PDLC film can be continuously controlled by varying the applied voltage across its electrodes. Various slopes and profiles of 3-D photoresist microstructures are easily and effectively fabricated by controlling applied voltages and biasing times of the PDLC film during one UV exposure step of the lithography process.
Keywords :
Lenses; Light scattering; Liquid crystal polymers; Lithography; Microoptics; Microstructure; Polymer films; Resists; Shape control; Voltage control;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627748
