• DocumentCode
    1874868
  • Title

    Scanning anode field emission microscopy for studies of planar cathodes

  • Author

    Semet, V. ; Mouton, R. ; Binh, Vu Thien

  • Author_Institution
    Equipe Emission Electron., Univ. Claude Bernard, Villeurbanne, France
  • fYear
    2004
  • fDate
    11-16 July 2004
  • Firstpage
    150
  • Lastpage
    151
  • Abstract
    Total field emission current in function of applied voltage, known as (I-V) characteristics, from planar cathodes were currently measured with a scanning anode field emission microscope (SAFEM). As the field distribution created by the probe over the flat cathode surface is not uniform and depends on the exact distance d between the probe and the surface, the measured I-V characteristics are not directly interpretable. We present a methodology to transform the I(V) measurements into the corresponding current density J in function of actual field F for field emission, the (J-F) characteristics that must be used for any quantitative interpretations.
  • Keywords
    cathodes; current density; field emission; field emission electron microscopy; I-V characteristics; cathode surface; current density; field distribution; planar cathodes; scanning anode field emission microscopy; total field emission current; Anodes; Cathodes; Current density; Current measurement; Density measurement; Displacement measurement; Microscopy; Polarization; Probes; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
  • Print_ISBN
    0-7803-8397-4
  • Type

    conf

  • DOI
    10.1109/IVNC.2004.1354944
  • Filename
    1354944