3D Nanohelix Fabrication and 3D Nanometer Assembly by Focused Ion Beam Stress-Introducing Technique

This paper reports for the first time a novel technique of nanoscale localized stress-introducing achieved by focused ion beam. The technique can be used to fabricate three-dimensional (3D) nanohelixes and implement 3D nanometer assemblies with the advantages of high flexibility, controllability and repeatability. Using the technique, 3D nanohelixes in both fixed-free and fixed-fixed forms with different structure parameters are successfully fabricated. In addition, a 3D cubic frame with 600-nm-wide beams is successfully assembled from two-dimensional patterns.