A low-noise sub-500µW lorentz force based integrated magnetic field sensing system

Author

Brenna, S. ; Minotti, P. ; Bonfanti, A. ; Laghi, G. ; Langfelder, G. ; Longoni, A. ; Lacaita, A.L.

Author_Institution

Dipt. di Elettron., Inf. e Bioingegneria, Politec. di Milano, Milan, Italy

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

932

Lastpage

935

Abstract

This paper shows, for the first time, a complete magnetic field sensing system including a Lorentz-force sensor operating out of resonance coupled to an integrated circuit for sensing and actuating the device. Working out of resonance, the trade-off between maximum sensing bandwidth and minimum detectable magnetic field is overwhelmed, improving the resolution and enlarging the bandwidth. However, the reduction of signal amplitude makes the readout electronics a critical block. Measurements carried-out on the whole system show an achievable resolution of 180 nT·mA/√Hz over a 150-Hz bandwidth and an overall power consumption of 460 μW. The integrated readout circuit low-noise performance does not limit the resolution, which is set by the MEMS thermomechanical noise.

Keywords

force sensors; magnetic field measurement; magnetic sensors; microsensors; readout electronics; MEMS thermomechanical noise; integrated magnetic field sensing system; integrated readout circuit; low-noise Lorentz force sensor; power 460 muW; power 500 muW; signal amplitude reduction; Abstracts; Generators; Magnetomechanical effects; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051113

Filename

7051113