Title :
Chip-scale electrodynamic synthetic jet actuators
Author :
Sawant, Shashank G. ; Deem, Eric A. ; Agentis, Dominic J. ; Cattafesta, Louis N. ; Arnold, David P.
Author_Institution :
Interdiscipl. Microsyst. Group, Univ. of Florida, Gainesville, FL, USA
Abstract :
We report a chip-scale electrodynamic synthetic jet actuator that integrates both a coil and a wax-bonded NdFeB permanent magnet using standard silicon micromachining processes. A copper micro-coil and a poly-dimethyl-siloxane (PDMS) diaphragm with the magnet are fabricated onto two different dies. An orifice, through which the jet is synthesized, is laser cut on the coil die. The dies are then assembled together to create a device with the dimensions 7.5 mm × 7.5 mm × 1 mm. Operating at 180 Hz and 20 mW input power, the device generates a fluidic jet with a peak velocity of 2.1 m/s.
Keywords :
boron alloys; copper; diaphragms; fluidic devices; iron alloys; jets; microactuators; micromachining; neodymium alloys; permanent magnets; polymers; silicon; waxes; Cu; NdFeB; PDMS diaphragm; Si; chip-scale electrodynamic synthetic jet actuators; coil die; copper microcoil; fluidic jet; frequency 180 Hz; poly-dimethyl-siloxane diaphragm; power 20 mW; silicon micromachining processes; size 1 mm; size 7.5 mm; velocity 2.1 m/s; wax-bonded permanent magnet; Actuators; Coils; Electrodynamics; Frequency measurement; Magnetic flux; Orifices; Powders;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051114
