Title :
Dynamics of Silicon Micro-Heaters: Modelling and Experimental Identification
Author :
Wiesmann, Dorothea ; Sebastian, Abu
Author_Institution :
IBM Zurich Research Laboratory, Rüschlikon, Switzerland
Abstract :
In this paper we present a novel tractable feedback model that captures the thermo-electric dynamics of silicon micro-heaters. The validity of the model is demonstrated using an analytical derivation from physical principles. Furthermore the model is applied to the synthesis of specific temperature profiles.
Keywords :
Electric variables; Fabrication; Feedback; Geometry; Heat sinks; Resistance heating; Resistors; Silicon; Temperature; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627766
