DocumentCode
1875392
Title
Electronic-photonic integration in the helios project
Author
Fedeli, J.M. ; Schrank, Franz ; Bogaerts, W. ; Masood, A. ; Zimmermann, L. ; Augendre, E. ; Bernabe, S. ; Kraft, J. ; Van Olmen, J. ; Sabuncuoglu Tezcan, D. ; Grosse, P. ; Enot, T.
Author_Institution
LETI, CEA, Grenoble, France
fYear
2013
fDate
28-30 Aug. 2013
Firstpage
146
Lastpage
147
Abstract
Different ways of integrating of integrating photonics and electronics at the wafer level scale are reviewed: Monolithic, Back-Side, and Front-Side integration. Type and volume applications are selection criteria.
Keywords
BiCMOS integrated circuits; integrated optoelectronics; wafer-scale integration; Helios project; backside integration; electronic-photonic integration; monolithic integration; wafer level scale; Arrayed waveguide gratings; BiCMOS integrated circuits; Bonding; CMOS integrated circuits; Photonics; Silicon; Through-silicon vias;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location
Seoul
ISSN
1949-2081
Print_ISBN
978-1-4673-5803-3
Type
conf
DOI
10.1109/Group4.2013.6644413
Filename
6644413
Link To Document