Field emission enhanced semiconductor thermoelectric cooler

Author

Weiss, Brock L. ; Cutler, P.H. ; Miskovsky, N.M. ; Chung, Nicholas M MiskovskyMoon ; Kumar, Nalin

Author_Institution

Dept. of Phys., Pennsylvania State Univ., Altoona, PA, USA

fYear

2004

fDate

11-16 July 2004

Firstpage

186

Abstract

Initial experimental results on the fabrication and measurements of a prototype field emission enhanced thermoelectric cooler device is reported. The device is based upon a silicon needle arrays fabricated by a focused ion beam technique. The device uses an electric field modulated current to transport heat from a cold source to a hot source via n- and p-type carriers. Cooling measurements are carried out in UHV system using both thermocouple and optical thermometry.

Keywords

cooling; electron field emission; elemental semiconductors; focused ion beam technology; prototypes; semiconductor devices; silicon; thermoelectricity; UHV system; electric field modulated current; field emission enhanced semiconductor thermoelectric cooler; focused ion beam technique; heat transport; n-type carriers; optical thermometry; p-type carriers; silicon needle arrays; thermocouple; Cooling; Fabrication; Ion beams; Needles; Particle beam optics; Prototypes; Resistance heating; Silicon; Thermoelectric devices; Thermoelectricity;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International

Print_ISBN

0-7803-8397-4

Type

conf

DOI

10.1109/IVNC.2004.1354964

Filename

1354964