Development of electron optical instrument for evaluation of multi emitters: real time observation of operating conditions of multi emitters by LEEM, PEEM and FEEM

Author

Murata, H. ; Kimura, T. ; Nishimura, Y. ; Shimoyama, H. ; Mogami, A. ; Sakai, Y. ; Kudo, M. ; Kato, M. ; Betsui, K. ; Inoue, K.

Author_Institution

Graduate Sch. of Sci. & Technol., Meijo Univ., Nagoya, Japan

fYear

2004

fDate

11-16 July 2004

Firstpage

188

Lastpage

189

Abstract

An electron optical instrument for evaluation of emission characteristics of multi emitters is developed to perform the following functions: (1) observation and recording of dynamical behaviors of emission patterns from the whole multi emitter unit as well as each individual working emitter; (2) image observation of geometrical shapes of individual emitters and gates; (3) measurement of emission current stability from the whole multi emitter unit as well as each individual working emitter. A field emitter array type of multi emitter is used as a specimen. The instrument is found to have the capability of real time and simultaneous observation of LEEM and FEEM images as well as PEEM and FEEM images.

Keywords

field emission electron microscopy; field emitter arrays; photoelectron microscopy; FEEM; LEEM; PEEM; dynamical behaviors of emission patterns; electron optical instrument; emission current stability; image observation of geometrical shapes; multiemitters evaluation; multiemitters operating conditions; real time observation; Current measurement; Electron emission; Electron optics; Geometrical optics; Instruments; Optical recording; Performance evaluation; Photoelectron microscopy; Shape measurement; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International

Print_ISBN

0-7803-8397-4

Type

conf

DOI

10.1109/IVNC.2004.1354965

Filename

1354965