Novel Measurement System of the Friction Coefficients for the Drie Sidewalls

A silicon friction meter employing simple beam springs with holding and driving comb actuators was suggested to evaluate the static and the dynamic friction coefficients of the DRIE silicon sidewalls. After moving the shuttle to a certain position, a symmetric normal force was applied on the sidewalls of the shuttle by the holding actuators. By ramp increasing the driving voltage, the slide distance was measured to evaluate the static and dynamic friction coefficients considering the spring nonlinearity. The effects of the contact width, the number of contact points and the normal force on friction coefficients were investigated.