Title :
Application of statistical element selection to 3D integrated AlN MEMS filters for performance correction and yield enhancement
Author :
Patterson, Albert ; Calayir, Enes ; Fedder, Gary K. ; Piazza, Gianluca ; Bo Woon Soon ; Singh, Navab
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
By 3D integration of an array of 12 nominally identical AlN MEMS sub-filters with a CMOS switching matrix and application of statistical element selection to the same system, we have built a self-healing filter offering 495 unique filter responses and a tuning range of 500 kHz for both center frequency and bandwidth. The demonstrated system enables correction of intrinsic, fabrication-induced variation in filter performance that would otherwise constitute a severe yield limitation to the manufacture of standalone filters.
Keywords :
CMOS integrated circuits; aluminium compounds; filters; micromechanical devices; statistical analysis; 3D integrated aluminium nitride MEMS filters; CMOS switching matrix; fabrication-induced variation; filter performance; filter response; performance correction; self-healing filter; standalone filter manufacture; statistical element selection; tuning range; yield enhancement; yield limitation; CMOS integrated circuits; Frequency measurement; III-V semiconductor materials; Micromechanical devices; Radio frequency; Resonator filters; Three-dimensional displays;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051129
