Application of statistical element selection to 3D integrated AlN MEMS filters for performance correction and yield enhancement

Author

Patterson, Albert ; Calayir, Enes ; Fedder, Gary K. ; Piazza, Gianluca ; Bo Woon Soon ; Singh, Navab

Author_Institution

Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

996

Lastpage

999

Abstract

By 3D integration of an array of 12 nominally identical AlN MEMS sub-filters with a CMOS switching matrix and application of statistical element selection to the same system, we have built a self-healing filter offering 495 unique filter responses and a tuning range of 500 kHz for both center frequency and bandwidth. The demonstrated system enables correction of intrinsic, fabrication-induced variation in filter performance that would otherwise constitute a severe yield limitation to the manufacture of standalone filters.

Keywords

CMOS integrated circuits; aluminium compounds; filters; micromechanical devices; statistical analysis; 3D integrated aluminium nitride MEMS filters; CMOS switching matrix; fabrication-induced variation; filter performance; filter response; performance correction; self-healing filter; standalone filter manufacture; statistical element selection; tuning range; yield enhancement; yield limitation; CMOS integrated circuits; Frequency measurement; III-V semiconductor materials; Micromechanical devices; Radio frequency; Resonator filters; Three-dimensional displays;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051129

Filename

7051129