Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator

Author

Uranga, A. ; Sobreviela, G. ; Barniol, N. ; Marigo, E. ; Tay-Wee-Song, C. ; Shunmugam, M. ; Zainuddin, A.A. ; Kumar-Kantimahanti, A. ; Madhaven, V. ; Soundara-Pandian, M.

Author_Institution

Univ. Autonoma de Barcelona, Bellaterra, Spain

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

1004

Lastpage

1007

Abstract

This paper demonstrates the feasibility of a novel fabrication approach of MEMS resonators above standard CMOS circuitry and with zero-level vacuum package. As a proof of concept a monolithical CMOS-MEMS-closed loop oscillator showing dual-clock capabilities (11.9 MHz and 24.5 MHz) is presented. These two frequencies correspond to two different resonator modes, specifically the torsional and vertical out of plane, of a paddle shaped MEMS resonator.

Keywords

CMOS integrated circuits; clocks; integrated circuit packaging; micromechanical resonators; oscillators; closed loop oscillator; dual-clock capabilities; fabrication approach; monolithical 0-level vacuum packaged MEMS-on-CMOS resonator; paddle shaped MEMS resonator; torsional plane; vertical out of plane; zero-level vacuum package; CMOS integrated circuits; CMOS technology; Micromechanical devices; Optical resonators; Oscillators; Resonant frequency; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051131

Filename

7051131