DocumentCode
1875666
Title
Experimental investigation on mode coupling of bulk mode silicon MEMS resonators
Author
Yushi Yang ; Ng, Eldwin ; Polunin, Pavel ; Yunhan Chen ; Strachan, Scott ; Vu Hong ; Chae Hyuck Ahn ; Shoshani, Ori ; Shaw, Steven ; Dykman, Mark ; Kenny, Thomas
Author_Institution
Stanford Univ., Stanford, CA, USA
fYear
2015
fDate
18-22 Jan. 2015
Firstpage
1008
Lastpage
1011
Abstract
This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the mode shape of the coupled modes, as well as the doping type / concentration, and crystal orientation, leading to a variety of complex and potentially useful phenomena.
Keywords
crystal orientation; elasticity; micromechanical resonators; semiconductor doping; bulk mode silicon MEMS resonators; coupled modes; crystal orientation; doping concentration; doping type; mode coupling; mode shape; nonlinear elasticity; resonant mode order; Couplings; Crystals; Doping; Micromechanical devices; Oscillators; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location
Estoril
Type
conf
DOI
10.1109/MEMSYS.2015.7051132
Filename
7051132
Link To Document