Title :
Experimental investigation on mode coupling of bulk mode silicon MEMS resonators
Author :
Yushi Yang ; Ng, Eldwin ; Polunin, Pavel ; Yunhan Chen ; Strachan, Scott ; Vu Hong ; Chae Hyuck Ahn ; Shoshani, Ori ; Shaw, Steven ; Dykman, Mark ; Kenny, Thomas
Author_Institution :
Stanford Univ., Stanford, CA, USA
Abstract :
This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the mode shape of the coupled modes, as well as the doping type / concentration, and crystal orientation, leading to a variety of complex and potentially useful phenomena.
Keywords :
crystal orientation; elasticity; micromechanical resonators; semiconductor doping; bulk mode silicon MEMS resonators; coupled modes; crystal orientation; doping concentration; doping type; mode coupling; mode shape; nonlinear elasticity; resonant mode order; Couplings; Crystals; Doping; Micromechanical devices; Oscillators; Resonant frequency; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051132
