Imaging of Acoustic Emission from Vibrating Micro/Nano Structures

In this paper, a novel imaging technique of acoustic emission from vibrating micro- and nano-structures is proposed and demonstrated for characterizing their mechanical energy losses via ambient air. A thermal probe is employed for the measurement of particle velocity involved in the acoustic emission. Imaging is obtained with scanning the vibrating sample under the thermal probe, which exhibits the geometry dependence on acoustic emission profile. Also it is found that strong acoustic emission is emitted from a mechanical detect formed on the vibrating beam.