DocumentCode :
187583
Title :
Threshold voltage drift (PBTI) in GaN D-MODE MISHEMTs: Characterization of fast trapping components
Author :
Lansbergen, G.P. ; Wong, K.Y. ; Lin, Y.S. ; Yu, J.L. ; Yang, F.J. ; Tsai, C.L. ; Oates, Anthony S.
Author_Institution :
TSMC Ltd., Hsinchu, Taiwan
fYear :
2014
fDate :
1-5 June 2014
Abstract :
VTH drift of GaN MISHEMTs under positive gate stress (PBTI) is shown to have a distinct fast component, independent of the gate dielectric material or details of the device architecture. The trap(s) responsible for this VTH degradation component are located at the GaN side of the GaN/dielectric interface. Since these fast traps have capture- and emission -times of the order of 10μs and 1ms respectively, its impact is not evident in the traditional DC characterization, yet it severely impacts device lifetime projections.
Keywords :
III-V semiconductors; MISFET; gallium compounds; high electron mobility transistors; wide band gap semiconductors; D-mode MISHEMT; GaN; PBTI; degradation component; device architecture; device lifetime projections; dielectric interface; fast trapping components; gate dielectric material; positive gate stress; threshold voltage drift; Dielectrics; Gallium nitride; HEMTs; Logic gates; MODFETs; Stress; Surface treatment; GaN; MISHEMT; VTH shift; fast traps;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 2014 IEEE International
Conference_Location :
Waikoloa, HI
Type :
conf
DOI :
10.1109/IRPS.2014.6861111
Filename :
6861111
Link To Document :
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