DocumentCode
1875846
Title
Multi-Walled Carbon Nanotube Filled Conductive Elastomers: Materials and Application to Micro Transducers
Author
Engel, Jonathan ; Chen, Nannan ; Nannan Chen ; Pandya, Saunvit ; Liu, Chang
Author_Institution
Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, USA
fYear
2006
fDate
2006
Firstpage
246
Lastpage
249
Abstract
We report a detailed study investigating the use of multi-walled carbon nanotube (MWNT) filled elastomers to enable sensitive and yet robust MEMS devices. This work is contrasted with previous work using carbon black filling, showing an 8-fold improvement in performance through the use of MWNT. The percolation behavior of MWNT in polydimethylsiloxane (PDMS) and polyurethane (PU) elastomers is presented. We have also developed and characterized two devices: (1) MWNT-based force sensitive resistors (FSRs), analogous to polymer piezoresistors; (2) robust collapsible capacitive tactile sensors using soft conductive elastomers.
Keywords
Carbon nanotubes; Conducting materials; Filling; Force sensors; Microelectromechanical devices; Organic materials; Polymers; Resistors; Robustness; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627782
Filename
1627782
Link To Document