Enhanced controllability in MEMS metamaterial

Author

Pitchappa, Prakash ; Chong Pei Ho ; You Qian ; Yu-Sheng Lin ; Singh, Navab ; Chengkuo Lee

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

1032

Lastpage

1035

Abstract

In this report, we demonstrate a method to enhance the controllability of MEMS tunable metamaterial by isolating the electrical routing of alternate lines in the metamaterial unit cell array. The metamaterial consists of alternate lines of split ring resonators with two released heights. This allows for two independent tuning characteristics for a single MEMS metamaterial by selecting between the two external control ports. This technology can be further improved to provide line or pixel wise control, and can even be programmed to have one of many functionalities such as tunable filter, multicolor spatial modulator, gradient metamaterial or random metamaterial.

Keywords

electromagnetic metamaterials; micromechanical resonators; electrical routing isolation; enhanced controllability; gradient metamaterial; independent tuning characteristics; line wise control; metamaterial unit cell array; multicolor spatial modulator; pixel wise control; random metamaterial; single MEMS tunable metamaterial; split ring resonator; tunable filter; Magnetic materials; Metamaterials; Micromechanical devices; Silicon; Substrates; Tuning; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051138

Filename

7051138